C30
Focus Ion Beam Milling
Date: 8.04.04
| Feature | Radius target [actual] | Mill current (nA) | Mill time (seconds) | Magnification |
| Pinhole course mill | 9 microns | 3.6 nA | 300 sec | |
| Pinhole Fine Mill | 10.0 microns | 449 pA | 300 second | |
| Three fine mills were used; the parameters were slightly different from the mill directly above | ||||
Metal Films
| Front side (membrane side) | |
| Back side (pit side) | 2.0 microns of gold (Metallica#4) |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: See Vol. 4 page 27