C9
Focus Ion Beam Milling
Date: 12.12.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 1000 | 10 | 300 | |
| Broken Symmetry (square) | 1000 | 10 | 100 | |
| Terrace | 500 | 10 | 10-25? time is uncertain | |
| Reference hole: top | 10 | 10 | 2.0+2.0 | 0 |
| Reference hole: bottom | 114 x 56 (diameter) | |||
| Center to center | 4000 nm | |||
Metal Films
| Front side (membrane side) | non |
| Back side (pit side) | Cr 2nm/ Au 1000nm |
Membrane Specifications
| Size (micrometers) | 100 x 100 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: