FIB Fourier Transform
Mask Parameter Table
127x75 um window
Structure details:
Structure details: Integrated
multilayer with two
reference holes
|
Feature |
Radius (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
0.5 |
D=964x890 |
|
|
|
|
|
1st Reference a perture: top |
50nm |
D=230x230 |
|
1st Reference aperture: bottom |
|
D=177x126 |
|
2nd Reference aperture: top |
15nm |
D=168x120 |
|
2nd Reference aperture: bottom |
|
D=31x97 |
|
Center to center |
2000nm |
2000nm |
Metal Film Details:
|
Front Side |
e4974 |
|
Back Side |
Metallica #9 |
Milling Deta
ils
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
.55 |
0 |
7 |
35 |
22 |
|
|
|
.5 |
0 |
7 |
35 |
2+2+2 |
|
|
< o:p> |
.45 |
0 |
7 |
35 |
2+2 |
Looks
clean as far as we can tell |
|
Refocused. |
|
|
|
|
|
|
|
1st ref |
0.020 |
0 |
7 |
65 |
35 |
Looks big but is circlar |
|
2nd ref |
0.020 |
0 |
7 |
65 |
4 |
Looks nice, a little oval |
|
|
|
|
|
|
|
C82_001_tilt_45_overview |
|
|
|
|
|
|
|
C82_002_r1 |
|
|
|
|
|
|
C82_003_r2 |
|
|
|
|
|
|
|
|
C82_004_sample |
|
|
|
|
|
|
|
C82_005_sample_bright |
|
|
|
|
|
|
|
C82_006_overview_1 |
|
|
|
|
|
|
|
C82_007_overview_2 |
|
|
|
|
|
|
|
C82_ 008_overview_3 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
C82_010_pt_r1 real (use real for 5kv) (10kev) |
|
|
|
|
|
|
|
C82_011_pt_r2 |
|
|
|
|
|
|
|
C82_012_pt_overview |
|
|
|
|
|
|
|
|
We didn’t focus the
ion beam much before we
drilled the reference holes. This may be why they are larger than
expected. It could also be that the
contrast for these images was different.
As it turns out these did make it all the way through the nitride,
however they are very oval so the stig must have been off. Also now that the
film was tested on a sister sample and was found not to be perpendicular.
Membrane Parameters
|
Size (μm) |
125x75 |
|
Th ickness (nm) |
100 |
|
Frame size( mm) |
5x5< /p> |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%