C51 100nm of extra platinum
Focus Ion Beam Milling
Date: YY/MM/DD 04/10/23
| Feature
|
Final Diameter nm | ||
| Target | Actual | ||
| Sample Aperture | 1500 | 1300x1300 | a little small |
| Broken Symmetry (square) | none | ||
| Reference Terrace | none | ||
| Reference aperture : top | ~250 | 244x217 | |
| Reference aperture : bottom | <100 | 115x68 | oval |
| Center to center | 3.5 | 3.5 | |
Metal Films
| Front side (membrane side) | e4633b 100nm of extra Pt |
| Back side (pit side) | Golden Gate #4 |
Membrane Specifications
| Size (micrometers) | 75x129 |
| Thickness (nm) | 100 nm |
| Frame size (mm) | 5 x 5 |
| Frame thickness (micrometers) | 200 |
Comments:
Lab notebook Vol. 5 page 38
Milling Specifics
| Feature
|
Final Radius nm | Trial | Outer Radius | Inner Radius | Ion aperture current (pA) | Total Mill time (seconds) | Magnification | |
| Target | Actual | |||||||
| Sample Aperture | 1 | |||||||
| 2 | ||||||||
| 3 | ||||||||
| 4 | ||||||||
| 5 | ||||||||
| Broken Symmetry (square) | ||||||||
| Reference Terrace | ||||||||
| Reference aperture : top | ||||||||
| Reference aperture : bottom | ||||||||
| Center to center | ||||||||