C20 (Similar to C17)
Focus Ion Beam Milling
Date: 17.02.04 (DD.MM.YY)
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 1000 | 10 | ~220 + touchup | 35-65kX |
| Broken Symmetry (square) | 1000 | 11 | 60 | 50 |
| Terrace | 250 | 1 | 30+46 | |
| Reference hole: top | 60 [~70] (real target was D=150nm | 1 | 30 | |
| Reference hole: bottom | D =100x97nm contrast only at 10kV | |||
| Center to center | 4000 nm | |||
Metal Films
| Front side (membrane side) | none |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: The reference hole for this sample was intended to be 150nm in diameter however the actual size falls short of this. Never the less the actual reference hole is nice an circular with a 100nm diameter.