C15

Images

Focus Ion Beam Milling

Date:  23.01.04 and 4.02.04

Date:  Remilled 6.02.04

Feature Radius target nm        [actual]  Mill current (pA)  Mill time (seconds) Magnification
Pinhole 500 1 192 50kX
Broken Symmetry (square) none - -  
Terrace none - -  
Reference hole: top 20   [] 1 60 50kX
2nd try  reference hole: top 20   [100nm] 10 12 80kX
Reference hole: bottom penetrates but size isn't clear.  ~100nm  
Center to center  2500 nm

Metal Films

Front side (membrane side) Pt(200)[Co(12)Pt(7)]_50 Pt(12) angstroms   Olav's code: e4195
Back side (pit side) Cr 2nm/ Au 600nm

Membrane Specifications

Size (micrometers)  200 x 200
Thickness (nm) 100
Frame size (mm) 5x5
Frame thickness (micrometers) 200
   

Comments:  The pinhole for this sample was milled first, but only through the gold leaving the SiN membrane intact.  Next a magnetic mulilayer was deposited over the membrane, and finally the reference hole was milled in the gold.

The reference hole for this sample was milled a second time since the first reference hole didn't penetrate the multilayer.