C14
Comments: Images show the contrast in SiN on the SEM for various energies.
Focus Ion Beam Milling
Date: 23.01.04
notebook: v.3 p13-14
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole |
Metal Films
| Front side (membrane side) | none |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: Images show the contrast in SiN on the SEM for various energies.