
FIB Fourier Transform
Mask Parameter Table
Saturday, September 3, 2005
200x200 um window
Structure details:
Structure details: Triple reference hole
Structure for looking
at whole biological organism
|
Feature |
Diameter (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
3.0 |
D=2900 |
|
|
|
|
|
1st Reference aperture: top |
150nm |
D=200x195 |
|
1st Reference aperture: bottom |
|
D=104x101 |
|
2nd Reference aperture: top |
100nm |
D=154x171 |
|
2nd Reference aperture: bottom |
|
D=87x96 |
|
3Rd Reference aperture: top |
5 0nm |
D=117x116 |
|
3rd Reference aperture: bottom |
|
D=44x47 |
|
5500 |
|
|
Metal Film Deta
ils:
|
Front Side |
<
td width=252 valign=top style='width:188.8pt;border:solid windowtext 1.0pt;
border-left:none;mso-border-left-alt:solid windowtext .5pt;mso-border-alt:
solid windowtext .5pt;padding:0in 5.4pt 0in 5.4pt;height:13.75pt'>
|
|
Back Side |
Metallica #9 |
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
1.5 |
0 |
6 |
35 |
10+100 |
Two islands aren’t milling |
|
|
.3 |
0 |
6 p> |
25 |
5+5 |
Does more cleaning |
|
|
1.55 |
0 |
6 |
25 |
30+30+30 |
Ramon
did a lot of cleaning up. |
|
|
|
|
|
|
|
Some small gold dots remain |
|
5.9 |
5.7 |
6 |
|
5 |
Ring for Refholes |
|
|
box |
.4x.4 |
|
6 |
|
2 |
3 boxes for Refholes (a little long) |
|
1st ref |
0.020 |
0 |
6 |
65 |
35 |
Looks good |
|
2nd ref p> |
0.020 |
0 |
6 |
65 |
15 |
|
|
3rd ref |
0.020 |
0 |
6 |
65 |
3 |
This was still as t |
|
|
|
|
|
|
|
C86_000_sample_tilt52 |
|
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|
C86_001_overview_tilt45 |
|
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|
C86_002_r1 |
|
|
|
|
|
|
|
C86_003_r2 |
|
<
p class=MsoNormal> |
|
|
|
|
|
C86_004_r3 |
|
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|
C86_005_sample |
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|
C86_0051_sample_bright |
|
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|
C86_006_overview_1 |
|
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C86_007_overview_2 |
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C86_008_overview_3 |
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|
C86_0061_carboncontamination |
|
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|
C86_009_back_r1 |
|
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|
C86_010_back_r2 |
|
|
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|
C86_011_back_r3 |
|
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|
C_012_back_overview |
|
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|
|
C_013_back_overview_15kV |
Operator ramon Small puncture in
them sample hole membrane
<
![if !vml]>
Membrane Parameters
|
Size (μm) |
200x200 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%