Name: C85
FIB Fourier Transform
Mask Parameter Table
Saturday, September 3, 2005
200x200 um window
Structure details:
Structure details: Triple reference hole
Structure for looking
at whole biological organism
|
Feature |
Diameter (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
3.0 |
D=2990 |
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1st Reference aperture: top |
150nm |
D=186x161 |
|
1st Reference aperture: bottom |
|
D=135x92 |
|
2nd Reference aperture: top |
100nm |
D=150x130 |
|
2nd Reference aperture: bottom |
|
D=90x79 |
|
3Rd Reference aperture: top |
50nm |
D=114x60 |
|
3rd Reference aperture: bottom |
|
D=50x36 |
|
5500 |
|
|
Metal Film Details:
|
Front Side |
organism to be injected |
|
Back Side |
Metallica #9 |
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
1.55 |
0 |
4 |
25 |
30+30+30+30+30+30+20 |
|
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|
.3 |
0 |
4 |
25 |
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1.55 |
0 |
4 |
25 |
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Some small gold dots remain |
|
ring |
5.9 |
5.7 |
4 |
|
5 |
Ring for Refholes |
|
box |
.4x.4 |
|
4 |
|
2 |
3 boxes for Refholes (a little long) |
|
1st ref |
0.020 |
0 |
4 |
65 |
35 |
|
|
2nd ref |
0.020 |
0 |
4 |
65 |
15 |
|
|
3rd ref |
0.020 |
0 |
4 |
65 |
3 |
This was still as t |
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C85_001_overview_tilt45 |
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C85_002_r1 |
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C85_003_r2 |
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C85_004_r3 |
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C85_005_sample |
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C85_0051_sample_bright |
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C85_006_overview_1 |
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C85_007_overview_2 |
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C85_008_overview_3 |
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C85_009_back_r1 |
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C85_010_back_r2 |
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C85_011_back_r3 |
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C85_012_back_overview |
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Membrane Parameters
|
Size (μm) |
200x2 00 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Operator bill Small puncture in
the nitride.
Overlap: 50%