FIB Fourier Transform
Mask Parameter Table
Saturday, September
3, 2005
200x200 um window
Structure details: Structure
details: Triple reference hole
Structure for looking
at bio-magnetic particles
|
Feature |
Diameter (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
1.5 |
D=1498 |
|
|
|
|
|
1st Reference aperture: top |
50nm |
D=107x128 |
|
1st Reference aperture: bottom |
|
D=74x85 |
|
2nd Reference aperture: top |
50nm |
D=116x112 |
|
2nd Reference aperture: bottom |
|
D=73x60 |
|
3Rd Reference aperture: top |
50nm |
D=101x95 |
|
3rd Reference ap erture: bottom |
|
D=40x38 |
|
|
|
|
Metal Film Details:
|
Front Side |
Bio-magnetic particles to be injected |
|
Back Side |
Metallica #9 |
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam C
urrent(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
0.8 |
0 |
6 |
35 |
50 |
|
|
|
0.37 |
0 |
6 |
35 |
5 |
Off center |
|
|
0.75 |
0 |
6 |
35 |
5 |
center |
|
|
0.70 |
0 |
6 |
35 |
5 |
|
|
|
0.4 |
0 |
6 |
35 |
2+3+3 |
Off center |
|
|
0.85 |
0 |
6 |
35 |
5+5 |
center |
|
|
0.11 |
0 |
6 |
35 |
0.5*3 |
Off center shifting |
|
|
0.77 |
0 |
6 |
35 |
2*3 |
center |
|
|
0.50 |
0 |
6 |
35 |
0.5*3 |
|
|
|
|
|
|
|
|
… And some more cleaning … |
|
|
4.3 |
4.2 |
6 |
|
3+3 |
Ring for Refholes |
|
|
|
|
6 |
|
3 |
3 boxes for Refholes |
|
1st ref |
0.020 |
0 |
6 |
65 |
12 |
|
|
2nd ref |
0.020 |
0 |
6 |
65 |
7 |
|
|
3rd ref |
0.020 |
0 |
6 |
65 |
3 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
C84_001_tilt_45_overview |
|
|
|
|
|
|
|
C84_002_r 1 |
|
|
|
|
|
|
|
C84_003_r2 |
|
|
|
|
|
|
C84_004_r3 |
|
|
|
|
|
|
|
|
C84_005_sample |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
C84_006_overview_1 |
|
|
|
|
|
|
|
C84_007_overview_2 |
|
|
|
|
|
|
|
C84_008_overview_3 |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
C84_009_back_r1 |
|
|
|
|
|
|
|
C84_010_back_r2 |
|
|
|
|
|
|
|
C84_011_back_r3 |
|
|
|
|
|
|
|
C84_012_back_overview |
|
|
|
|
|
|
|
C84_013_back_overview_15kV |
Membrane Parameters
|
Size (μm) |
200x200 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Operator bill This has a patch
of gold in the center of the sample hole.
The referen
ce holes are fairly round and the smallest reference hole
is ~40nm and round
Overlap: 50%