FIB Fourier Transform
Mask Parameter Table
Saturday, September 3, 2005
200x200 um window
Structure details: Structure
details: Triple reference hole
Structure for looking
at bio-magnetic particles
|
Diameter (μm) |
||
|
Target |
Actual |
|
|
Sample Aperture |
1.5 |
D=1510 |
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|
1st Reference aperture: top |
50nm |
D=118x123 |
|
1st Reference aperture: bottom |
|
D=87x40 |
|
2nd Reference aperture: top |
50nm |
D=141x101 |
|
2nd Referen ce aperture: bottom |
|
D=74x32 |
|
3Rd Reference aperture: top |
50nm |
D=124x93 |
|
3rd Reference aperture: bottom |
|
D=41x46 |
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|
Metal Film Details:
|
Front Side |
Bio-magnetic particles to be injected |
|
Back Side |
Metallica #9 |
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample < /td> |
.8 |
0 |
5 |
35 |
5+40 |
Large bump appears |
|
|
.5 |
0 |
5 |
35 |
5+5+5 |
Offset to mill bump |
|
|
.8 |
0 |
5 |
35 |
10+10 |
This
time on center |
|
|
.3 |
0 |
5 |
35 |
2+2+2 |
Another off center etch |
|
|
.3 |
0 |
5 |
20 |
2+2 |
This level it out a little |
|
|
.19 |
0 |
5 |
20 |
.5 x |
After many well placed |
|
|
.75 |
0 |
5 |
20 |
5 |
Seems cleaner |
|
|
.85 |
0 |
5 |
20 |
5+5+5+2+2s |
Some gold left but we will stop |
|
|
.9 |
0 |
5 |
20 |
2 |
Still some gold left but we gave in fear of having nitride left at the bottom |
|
|
4 |
3.9 |
5 |
25 |
10 |
Ring for ref, but a little long |
|
1st ref |
0.020 |
0 |
5 |
65 |
10 |
|
|
2nd ref |
0.020 |
0 |
5 |
65 |
6 |
A little oval |
|
3rd ref |
0.020 |
0 |
5 |
65 |
3 |
<
p class=MsoNormal> |
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|
C83_001_tilt_45_overview |
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C83_002_r1 |
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C83_003_r2 |
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C83_004_r3 |
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C83_005_sample |
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C_006_overview_1 |
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C_007_overview_2 |
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C_008_overview_3 |
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C_009_back_ref (r1) |
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C_010_back_r2 |
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C_011_back_r3 |
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C_012_back_overview (THE PICTURE!) |
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Operator Sample
Ramon Operator Refholes
Bill
Membrane Parameters
|
Size (μm) |
200x200 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%