FIB Double Pinholes
for Coherence Test, Parameter Table
Wed, July, 7th,
2005
Structure
details: 2000nm Au-Film on 100nm
Nitridemembrane
|
Feature |
Radius (μm) |
|
|
Target |
Actual |
|
|
|
|
|
|
|
|
|
|
1st aperture: top |
150nm |
429x427 |
|
1st aperture: bottom |
|
342x358 |
|
2nd aperture: top |
150nm |
421x421 |
|
2nd aperture: bottom |
|
345x356 |
|
Center to center |
3000nm |
2913.1nm |
Metal Film Details:
|
Front Side |
|
|
Back Side |
Metallica #5+7 |
|
|
|
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
1.Terrace |
.5 |
0 |
10 |
35 |
30 |
|
|
1.Terrace |
.6 |
0 |
10 |
35 |
20 |
|
|
2x.Terrace |
.5 |
0 |
10 |
35 |
30 |
At
90 deg (misplaced) |
|
2x.Terrace |
.6 |
0 |
10 |
35 |
20 |
At
90 deg (misplaced) |
|
2.Terrace |
.5 |
0 |
10 |
35 |
30 |
At
45 deg |
|
2.Terrace |
.6 |
0 |
10 |
35 |
20 |
At
45 deg |
|
1.Pinhole |
.18 |
0 |
10 |
35 |
150 |
|
|
2.Pinhole |
.18 |
0 |
10 |
35 |
150 |
|
|
|
|
|
|
|
|
C71_tilt52_overview_01 |
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C71_twoholes_02 |
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C71_overview_03 |
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|
C71_twoholes_back_04 |
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C71_upper_hole_back_05 (abs rot not true) |
|
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C71_lower_hole_back_06 (abs rot not true) |
|
|
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|
|
C71_absolute rotation_07 |
|
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Three tereses
were drilled. One was acedentally
drilled because the scan rotation was wrong. Once that was corrected the proper
terrice was made. WFS v7 p13/15,
RRv1p6
Membrane Parameters
|
Size (μm) |
~127x78 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%