FIB Fourier Transform
Mask Parameter Table
Friday, April 22, 2005
Structure details: Magnetic coated nanospheres with two reference holes
|
Feature |
Radius (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
0.5 |
928x866 |
|
|
|
|
|
1st Reference aperture: top |
60nm |
241x244 |
|
1st Reference aperture: bottom |
|
182x100 |
|
2nd Reference aperture: top |
30nm |
200x162 |
|
2nd Reference aperture: bottom |
|
80x143nm |
|
Center to center |
2000nm |
1948 x 2015 |
Metal Film Details:
|
Front Side |
110nm spheres first |
|
Back Side |
Metallica #6 |
|
|
|
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
.55 |
0 |
18 |
35 |
15 |
Some gold left |
|
|
.5 |
|
18 |
35 |
2 |
Sill some gold |
|
|
.45 |
|
18 |
35 |
2 |
Looks
clean going to zero tilt to see Still
some gold left so back to tilt |
|
|
.45 |
0 |
18 |
35 |
2 |
Looks good again |
|
|
.43 |
|
18 |
35 |
1 |
Perfect!! |
|
|
|
|
|
|
|
|
|
1st ref |
.020 |
0 |
18 |
65 |
45 |
|
|
2nd |
0.020 |
0 |
18 |
65 |
15 |
|
|
|
|
|
|
|
|
C67_001_tilt_overview |
|
|
|
|
|
|
|
C67_002_overview |
|
|
|
|
|
|
|
C67_003_r1 |
|
|
|
|
|
|
|
C67_004_r2 |
|
|
|
|
|
|
|
C67_005_sample |
|
|
|
|
|
|
|
C67_006_over_highcontrast |
|
|
|
|
|
|
|
C67_007_over_dist |
|
|
|
|
|
|
|
C67_008_chip |
|
|
|
|
|
|
|
C67_009_back_15kV overview |
|
|
|
|
|
|
|
C67_010_back_5_overivew |
|
|
|
|
|
|
|
C67_011_back_r1 C67_012_back_r2 |
Membrane Parameters
|
Size (μm) |
~125x75 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%