FIB Fourier Transform
Mask Parameter Table
Wednesday, March 30, 2005
Structure details:
Structure details: Integrated
multilayer with two
reference holes
|
Feature |
Radius (μm) |
|
|
Target |
Actual |
|
|
Sample Aperture |
0.5 |
D=950x926 |
|
|
|
|
|
1st Reference aperture: top |
60nm |
D=182x187 |
|
1st Reference aperture: bottom |
|
D=92x119 |
|
2nd Reference aperture: top |
30nm |
D=150x154 |
|
2nd Reference aperture: bottom |
|
D=100x63 |
|
Center to center |
2500nm |
2400-2500nm |
Metal Film Details:
|
Front Side |
e4556s |
|
Back Side |
Metallica #7 |
|
|
|
Milling Details
|
Milling Features |
Outer Radius (μm) |
Inner Radius (μm) |
Ion Beam Current(pA) |
Mag (kX) |
Mill time (s) |
Comments and Filenames |
|
Sample |
.55 |
0 |
15 |
35 |
19 |
|
|
|
.5 |
0 |
15 |
35 |
2+2 |
Still a little gold |
|
|
.45 |
0 |
15 |
35 |
2 |
There
is still a little fleck of gold that remains.
I don’t want to risk damage so I will leave it |
|
Re |
|
|
|
|
|
|
|
1st ref |
0.020 |
0 |
15 |
65 |
35 |
|
|
2nd ref |
0.020 |
0 |
15 |
65 |
18 |
|
|
|
|
|
|
|
|
C63_001_45_overview |
|
|
|
|
|
|
|
C63_002_r1 |
|
|
|
|
|
|
|
C63_003_r2 |
|
|
|
|
|
|
|
C63_004_sample_01 |
|
|
|
|
|
|
|
C63_005_overview_1 |
|
|
|
|
|
|
|
C63_006_overview_2 |
|
|
|
|
|
|
|
C63_007_overview_3 |
|
|
|
|
|
|
|
C63_008_pt_15kv_overview |
|
|
|
|
|
|
|
C63_009_pt_r1 |
|
|
|
|
|
|
|
C63_010_pt_r2 |
|
|
|
|
|
|
|
C63_011_pt_overivew |
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
|
Membrane Parameters
|
Size (μm) |
~125x75 |
|
Thickness (nm) |
100 |
|
Frame size( mm) |
5x5 |
|
Frame thickness (μm) |
200 |
Dwell: 1.0 μs
Overlap: 50%