C50 300nm of extra platinum

      

Images

Focus Ion Beam Milling

Date:    YY/MM/DD  04/10/23

Feature

 

Final Diameter nm      
 Target Actual
Sample Aperture 1500 1400x1400 a little small
Broken Symmetry (square) none    
Reference Terrace none    
Reference aperture : top ~250 480x470 These are the redrill values
Reference aperture : bottom <100 290x290 Round and certainly penetrates, but very large.
Center to center 3.5 3.5  

Metal Films

Front side (membrane side) e4633a 300nm of extra Pt
Back side (pit side) Golden Gate #4

Membrane Specifications

Size (micrometers)   74x128
Thickness (nm)  100 nm
Frame size (mm)  5 x 5
Frame thickness (micrometers)  200
   

Comments:    Reference hole had to be drilled twice

Lab notebook Vol. 5 page 36

 

 

Milling Specifics

Feature

 

Final Radius   nm       Trial Outer Radius Inner Radius Ion aperture current (pA) Total Mill time (seconds) Magnification
Target  Actual
Sample Aperture     1
2
3
4
5
Broken Symmetry (square)          
Reference Terrace          
Reference aperture : top          
Reference aperture : bottom            
Center to center