C41 (similar to C40)
Focus Ion Beam Milling
Date: YY/MM/DD 04/10/10
| Feature
|
Final Diameter nm | ||
| Target | Actual | ||
| Sample Aperture | 2000 | 2000 | Penetrates SiN and Au |
| Broken Symmetry (square) | 1000 | 1000 | square imposed on circle |
| Reference Terrace | none | ||
| Reference aperture : top | 100 | ||
| Reference aperture : bottom | 100 | 100x80 | looks like a rounded triangle |
| Center to center | 4000 | 4000 | |
Metal Films
| Front side (membrane side) | to be deposited at Juelich |
| Back side (pit side) | ~800nm Au See Golden Gate #2 |
Membrane Specifications
| Size (micrometers) | 75x127 |
| Thickness (nm) | 100 nm |
| Frame size (mm) | 5 x 5 |
| Frame thickness (micrometers) | 200 |
Comments:
Milling Specifics ( See Vol 4. page 91)
| Feature
|
Final Radius nm | Trial | Outer Radius | Inner Radius | Ion aperture current (pA) | Total Mill time (seconds) | Magnification | |
| Target | Actual | |||||||
| Sample Aperture | 1 | |||||||
| 2 | ||||||||
| 3 | ||||||||
| 4 | ||||||||
| 5 | ||||||||
| Broken Symmetry (square) | ||||||||
| Reference Terrace | ||||||||
| Reference aperture : top | ||||||||
| Reference aperture : bottom | ||||||||
| Center to center | ||||||||