C39
Focus Ion Beam Milling
Date: YY/MM/DD 04/10/10
| Feature
|
Final Diameter nm | ||
| Target | Actual | ||
| Sample Aperture | 5000 | 2100 | Au milled but SiN not penetrated (see comment) |
| Broken Symmetry (square) | none | ||
| Reference Terrace | none | ||
| Reference aperture : top | 100 | 129x163 | |
| Reference aperture : bottom | 200 | penetration assumed no SEM characterization | |
| Center to center | 4000 | 4000 | |
Metal Films
| Front side (membrane side) | to be deposited at Juelich |
| Back side (pit side) | ~800nm Au See Golden Gate #2 |
Membrane Specifications
| Size (micrometers) | |
| Thickness (nm) | 100 nm |
| Frame size (mm) | 5 x 5 |
| Frame thickness (micrometers) | 200 |
Comments: The selective etch of the Au on this sample much more difficult than normal. As a result the nitride was penetrated in a small ~200nm area. Not all of the Au was removed, the edges are not well defined and the no longer has a nice uniformity. For the three hours spent on the selective etch the results were not fruitful enough to try any make any more sample. Possible reasons that this didn't work even though it has been achieved in the past are as follows:
1) The Au deposition in the new Golden Gate chamber produced different microstructure than metallica.
2) The larger size of the hole or the increased thickness make it difficult to etch at a uniform rate over the entire structure.
3) Different FIB parameters?
See C38 for additional anlysis.
Milling Specifics ( See Vol 4. page 92)
| Feature
|
Final Radius nm | Trial | Outer Radius | Inner Radius | Ion aperture current (pA) | Total Mill time (seconds) | Magnification | |
| Target | Actual | |||||||
| Sample Aperture | 1 | |||||||
| 2 | ||||||||
| 3 | ||||||||
| 4 | ||||||||
| 5 | ||||||||
| Broken Symmetry (square) | ||||||||
| Reference Terrace | ||||||||
| Reference aperture : top | ||||||||
| Reference aperture : bottom | ||||||||
| Center to center | ||||||||