C32
Focus Ion Beam Milling
Date: 8.20.04
| Feature | Radius target [actual] | Mill current | Mill time (seconds) | Magnification |
| Pinhole course mill | 22 microns | 20.3 nA | 300 sec | 2 kX |
| Pinhole Fine Mill | 25 microns | 3 nA | 240 second | |
Metal Films
| Front side (membrane side) | |
| Back side (pit side) | 2.0 microns of gold (Metallica#4) |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: See Vol. 4 page 35