C29
Focus Ion Beam Milling
Date: 08.20.04 and 08.04.04
| Feature | Radius target nm [actual] | Mill current (nA) | Mill time (seconds) | Magnification |
| Pinhole course mill | ||||
| Pinhole Fine Mill | ||||
Metal Films
| Front side (membrane side) | |
| Back side (pit side) | 2.0 microns of gold (Metallica#4) |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: Practice hole drilling. Discovered that it is impossible to drill a ring and expect the circle to fall out the entire disk must be milled.