C28
Focus Ion Beam Milling
Date: 02.17.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 1000 | 10 | 255 | |
| Broken Symmetry (square) | 1.0 by 1.0 microns | 10 | 60 | |
| Terrace | 250 | 1 | 70 | 35kX |
| Reference hole: top | R= 70nm (130.7x 142nm) | 1 | 40 | 120kX |
| Reference hole: bottom | 151nm x 157nm | |||
| Center to center | 4 microns | |||
Metal Films
| Front side (membrane side) | |
| Back side (pit side) | 600nm of Au Metallica#3 This chip was not elevated when gold was evaporated on the back |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: See page 66 of Vol. 3. Small blemish is found on the window opposite the hole structures. Since it is most likely dust coated in gold it should not be a problem