C26
Focus Ion Beam Milling
Date: 02.17.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 1100 | 11 | 360 | 50kx |
| Broken Symmetry (square) | 1.1 by 1.1 microns | 10 | 60 | 50kX |
| Broken Symmetry (2 triangles) | .77 microns by .26 microns | 10 | 60 | 50kX |
| Terrace R1 | 250 | 1 | 70 | 35kX |
| Reference hole R1: top | 80nm and 60nm (159x 144nm) | 1 and 1 | 40 and 20 | |
| Reference hole R1 : bottom | 139nm by 150nm very round | |||
| Center to center R1 | 4 microns | |||
| Terrace R2 | 250 | 1 | 70 | 35kX |
| Reference hole R2: top | 20nm (52x 70nm) | 1 | 14 | 120kX |
| Reference hole R2: bottom | 44nm by 37nm | |||
| Center to center R2 | 4 microns | |||
Metal Films
| Front side (membrane side) | |
| Back side (pit side) | 600nm of Au Metallica#3 |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: See page 68 of Vol. 3.