C24 (similar to C18, only better)
Focus Ion Beam Milling
Date: 6.02.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 500 | 10 | 45 | |
| Broken Symmetry (square) | 500 | 1 | 120 | |
| Terrace | 250 | 1 | 100 | |
| Reference hole: top | 20 [r=100nm] | 1 | 15 | 150 kX |
| Reference hole: bottom | penetrates completely diameter 70nm x 60nm | |||
| Center to center | 2000 nm | |||
Metal Films
| Front side (membrane side) | non |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: The reference hole for this mask is small and penetrates completely. It is better than C18 which had an obstructed reference hole that was slightly larger.