C23 (similar to C21)
Focus Ion Beam Milling
Date: 6.02.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 750 | 10 | 50 + cleanup | |
| Broken Symmetry (square) | none | - | - | |
| Terrace | none | - | - | |
| Reference hole: top | 20 [125nm] | 10 | 18 | 80kX |
| bottom of reference hole | penetrates somewhat eliptical 150x100nm | |||
| Center to center | 3000 nm | |||
Metal Films
| Front side (membrane side) | Pt(200)[Co(12)Pt(7)]_50 Pt(12) angstroms Olav's code: e4195 |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: The magnetic multilayer and gold were deposited before the FIB was used. Both the pinhole and the reference hole were milled during the same session.