C22
Focus Ion Beam Milling
Date: 4.02.04
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 750 | 1 | 280 + cleanup | |
| Broken Symmetry (square) | none | - | - | |
| Terrace | none | - | - | |
| Reference hole: top | 20 [] | 1 | 75 | 65kX |
| Reference hole: bottom | ?? | |||
| Center to center | 3000 nm | |||
Metal Films
| Front side (membrane side) | Pd(200)[Co(12)Pd(7)]_50 Pd(12) angstroms Olav's code: e4196 |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: The magnetic multilayer and gold were deposited before the FIB was used. Both the pinhole and the reference hole were milled during the same session.