C19
Focus Ion Beam Milling
Date:
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 500 | 12 | 45 | |
| Broken Symmetry (square) | 500 | 2 | 120 | |
| Terrace | 250 | 1 | 85 | 50kx |
| Reference hole: top | 20 [45] | 1 | 15 | 100kX |
| Reference hole: bottom | ||||
| Center to center | 3000 nm | |||
Metal Films
| Front side (membrane side) | none |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: This chip was dropped on the floor of the lab, with the SiN down. After recovering it from the floor I looked at it with the SEM on the membrane side and it appeared intact and in good condition.