C19

Images

Focus Ion Beam Milling

Date:

Feature Radius target nm        [actual]  Mill current (pA)  Mill time (seconds) Magnification
Pinhole 500 12 45  
Broken Symmetry (square) 500 2 120  
Terrace 250 1 85 50kx
Reference hole: top 20   [45] 1 15 100kX
Reference hole: bottom        
Center to center  3000 nm

Metal Films

Front side (membrane side) none
Back side (pit side) Cr 2nm/ Au 600nm

Membrane Specifications

Size (micrometers)  200 x 200
Thickness (nm) 100
Frame size (mm) 5x5
Frame thickness (micrometers) 200
   

Comments:  This chip was dropped on the floor of the lab, with the SiN down.  After recovering it from the floor I looked at it with the SEM on the membrane side and it appeared intact and in good condition.