C17
Focus Ion Beam Milling
Date: January 28, 2004
| Feature | Radius target nm [actual] | Mill current (pA) | Mill time (seconds) | Magnification |
| Pinhole | 1000 | 12 | 120 + 90 | |
| Broken Symmetry (square) | 1000 | 12 | 60 | |
| Terrace | 250 | 1 | 85 | |
| Reference hole: top | 50 | 1 | 20 | |
| Reference hole: bottom | ||||
| Center to center | 4000 nm | |||
Metal Films
| Front side (membrane side) | none |
| Back side (pit side) | Cr 2nm/ Au 600nm |
Membrane Specifications
| Size (micrometers) | 200 x 200 |
| Thickness (nm) | 100 |
| Frame size (mm) | 5x5 |
| Frame thickness (micrometers) | 200 |
Comments: