C17

Images

Focus Ion Beam Milling

Date: January 28, 2004

Feature Radius target nm        [actual]  Mill current (pA)  Mill time (seconds) Magnification
Pinhole 1000 12 120 + 90  
Broken Symmetry (square) 1000 12 60  
Terrace 250 1 85  
Reference hole: top 50 1 20  
Reference hole: bottom        
Center to center 4000 nm

Metal Films

Front side (membrane side) none
Back side (pit side) Cr 2nm/ Au 600nm

Membrane Specifications

Size (micrometers)  200 x 200
Thickness (nm) 100
Frame size (mm) 5x5
Frame thickness (micrometers) 200
   

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