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Total Reflection X-Ray Fluorescence     


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The Stanford Synchrotron Radiation Laboratory (SSRL) has established a state of the art facility to analyze trace contamination on the surface of practical silicon wafers using the technique of Total Reflection X-Ray Fluorescence (TXRF).  The project started as a direct collaboration with scientists from both Intel and Hewlett Packard.  The project was  subsequently broadened to include Sematech member companies with the goal of developing a facility that could be used routinely by the semiconductor industry.  The goal has been meet where semiconductor companies are able to bring full wafers (up to 200 mm presently) for multipoint analysis at detection limits better than 1E8 atoms/cm2.  The semiconductor companies and other laboratories that have participated  in this project have included: AMD, Applied Materials, Atominstitute, Balazs Analytical Labs, Charles Evans and Associates, DEC, Dow Chemical, Hewlett Packard, IBM, Intel, Komatsu, Lucent, MIT, Motorola, National Instruments, Rigaku, Sandia National Laboratory, Stanford University, Texas Instruments, Wacker, and Waseda University.


Contact Information

Please contact us if you have any questions regarding the SSRL TXRF program.

Postal address
2275 Sand Hill Road
          Bldg. 137, MS 69
          Menlo Park, CA 94025
Electronic mail
General Information: pianetta@ssrl.slac.stanford.edu
Webmaster: singhace@stanford.edu
Send mail to singhace@stanford.edu with questions or comments about this web site.
Last modified: August 27, 2000